YH2M8432F Vertical Double-Sided Polisher
This machine is primarily used for double-sided grinding and polishing of thin-sheet parts made of semiconductor materials such as silicon, germanium, and quartz crystal, as well as non-metallic hard and brittle materials such as optical glass and ceramics.

Technical characters
Main Features
1. The machine's tray, lower plate, and hollow shaft are supported by high-rigidity, high-precision bearings and fixed sleeves, ensuring extremely high tray end runout. The fixed sleeve and hollow shaft utilize internal and external bore grinding.
2. Ring Gear Lifting: A newly developed external ring gear lifting mechanism offers higher lifting accuracy and consistency, preventing binding. This also increases the planetary gear's motion precision and facilitates polishing pad replacement.
3. Planetary Gear Meshing: A newly designed pin meshing mechanism allows for quick removal and replacement of individual pins when the inner ring gear or sun gear teeth wear, eliminating the need to replace the entire inner ring gear or sun gear. This reduces costs and enhances maintenance convenience.
4. To enable subsequent automated loading and unloading by industrial robots, the machine's sun gear assembly and lower plate drive components are controlled by servo motors. These components, in conjunction with the cylinder in the outer ring gear positioning device, accurately position the outer ring gear's tapered locating pins via vertical motion, and achieve secondary precise positioning after rotation. This ultimately enables trouble-free operation when the industrial robot retrieves the planetary gear and loads and unloads the workpiece.
5. The machine's fluid supply system:①Independent fluid supply pumps and agitation pumps ensure the polishing fluid is fully suspended and free of sedimentation. All fluid supply piping and fittings are made of stainless steel, and the pipes are constructed of flexible steel hoses. The flow trough utilizes a sealed-end design, with up to 40 outlet pipes connected to the upper plate outlet port, ensuring uniform and high-flow polishing fluid.②The fluid supply system (polishing liquid storage tank) features a cooling function. Users can optionally connect cooling water (pipe opening inner diameter:Φ12) as needed. The cooling water temperature is≤15°C and the pressure is 2 kg/cm².
Performance
Items | Model |
Polishing plate size | Φ1070xΦ495x45mm |
Upper grinding plate speed | 2-25r/min |
Lower grinding plate speed | 2-50r/min |
Sun gear speed | 2-22r/min |
Upper plate lift stroke | 450mm |
Ring gear lift stroke | 30mm |
Maximum machining pressure | 350kg |
Lower plate end face runout tolerance | 0.12mm |
Ring gear radial runout tolerance | 0.25mm |
Ring gear end face runout tolerance | 0.25mm |
Sun gear radial runout tolerance | 0.15mm |
Sun gear end face runout tolerance | 0.15mm |
Power supply | Three-phase five-wire AC380V |
Total equipment power | 15kW |
Main unit dimensions (L x W x H) | Approximately 1800×1500×2900mm |
Total machine weight | Approximately 3500kg |
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